Direct laser ablation of sub-100 nm line structures into polyimide - Concepedia

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Direct laser ablation of sub-100 nm line structures into polyimide

54

Citations

9

References

1992

Year

H. M. Phillips, D. L. Callahan, R. Sauerbrey, G. Szabó, Z. Bor

Applied Physics A

Materials ScienceMaterials EngineeringAdvanced Laser ProcessingEngineeringApplied PhysicsLaser ApplicationsLaser AblationLaser MaterialLaser Processing TechnologyDirect Laser AblationLaser-assisted DepositionHigh-power Lasers

References

	Year	Citations

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