Concepedia

Direct laser ablation of sub-100 nm line structures into polyimide

H. M. Phillips, D. L. Callahan, R. Sauerbrey, G. Szabó, Z. Bor

Applied Physics A · 1992 · 54 citations · 9 references

DOI

Concepts

References

9

Laser-Induced Periodic Surface Structure on Solids: A Universal Phenomenon

H. M. van Driel, J. E. Sipe, Jeff F. Young · Physical Review Letters · 1982 · 393 citations

, , +17

Excimer laser etching of polyimide

James H. Brannon, J. R. Lankard, A. I. Baise et al. · Journal of Applied Physics · 1985 · 386 citations

, , +17

Stimulated Wood's anomalies on laser-illuminated surfaces

A. E. Siegman, P. M. Fauchet · IEEE Journal of Quantum Electronics · 1986 · 225 citations

, , +12

Sub-100 nm lines produced by direct laser ablation in polyimide

H. M. Phillips, D. L. Callahan, R. Sauerbrey et al. · Applied Physics Letters · 1991 · 98 citations

, , +15

Periodic surface structures in the excimer laser ablative etching of polymers

P. E. Dyer, R. J. Farley · Applied Physics Letters · 1990 · 97 citations

, , +17