Publication | Closed Access
Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating
14
Citations
30
References
2013
Year
Materials ScienceTribological CoatingEngineeringHydrodynamic LubricationMicrofabricationMechanical EngineeringApplied PhysicsPiston-ring LubricationTribological PropertyMicro-electromechanical SystemMicroelectronicsMicrostructurePolycrystalline Silicon Mems
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