Publication | Closed Access
Development of a micro-opto-mechanical accelerometer based on intensity modulation
29
Citations
7
References
2004
Year
EngineeringMicrofabricationMechanical EngineeringIntensity ModulationAccelerometerInclinometerInstrumentationMicro-electromechanical System
| Year | Citations | |
|---|---|---|
Page 1
Page 1