Diameter-Controlled Carbon Nanotubes Grown from Lithographically Defined Nanoparticles

Abstract

We report the novel synthesis method of iron nanoparticles that can easily control both position and diameter significantly smaller than the lithography limit, and also demonstrate diameter- and position-controlled carbon nanotube (CNT) growth from the nanoparticles. We patterned iron particles having a 1.7 ±0.6 nm diameter distribution within a positioning accuracy of ±5 nm by means of the "lithographically-anchored nanoparticle synthesis (LANS)" method. CNTs were grown by chemical vapor deposition using ethanol. A catalyst activity of ∼10% and a CNT diameter distribution of 1.3 ±0.4 nm were obtained. Raman spectroscopy revealed the presence of single-walled CNTs.