Surface activation of thin silicon oxides by wet cleaning and silanization - Concepedia

Concepedia

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Surface activation of thin silicon oxides by wet cleaning and silanization

137

Citations

24

References

2006

Year

Yi Han, Dirk Mayer, Andreas Offenhäusser, Sven Ingebrandt

Thin Solid Films

Materials ScienceEngineeringSurface ScienceApplied PhysicsThin Silicon OxidesSurface EngineeringWet CleaningSilicon On InsulatorSurface ActivationSurface Processing

References

	Year	Citations

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