Thermophysical Properties of Transparent Conductive Nb-Doped TiO<sub>2</sub> Films

Chihiro Tasaki, Nobuto Oka, Takashi Yagi, Naoyuki Taketoshi, Tetsuya Baba, Toshihisa Kamiyama, Shin Nakamura, Yuzo Shigesato

Japanese Journal of Applied Physics · 2012 · 22 citations · 32 references

Concepts

Abstract

The thermophysical properties of Nb-doped TiO 2 (Nb:TiO 2 ) films were studied in terms of electrical conductivity and Nb concentration. The thermal diffusivity of Nb:TiO 2 films with various Nb concentrations was investigated and found to range from (1.2–2.1)×10 -6 m 2 s -1 . The thermal conductivity of Nb:TiO 2 films with 8.5 at. % Nb concentration is proportional to the electrical conductivity in conformity with the Wiedemann–Franz law. The thermal conductivity carried by phonons, λ ph , of Nb:TiO 2 films decreased with increasing Nb concentration. The mean free path of phonons, l ph , in Nb:TiO 2 films was estimated to be almost the same as the average distance between Nb impurities. The grain size was much larger than l ph . Thus, phonon scattering by Nb impurities should be the dominant factor for the change in λ ph .

References

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