Integration of Single‐Crystal LiNbO₃ Thin Film on Silicon by Laser Irradiation and Ion Implantation– Induced Layer Transfer

Abstract

Integration of high-quality ferroelectric thin films, e.g., LiNbO3, in planar device architectures on silicon substrates remains a technological challenge. The successful fabrication of a suspended micro-disk resonator structure (see figure) suggests that the method reported here—a combination of wafer bonding, ion implantation, and layer transfer induced by laser irradiation—may be useful in optoelectronic device applications.