Publication | Closed Access
Effects of nitrogen gas ratio on composition and microstructure of BCN films prepared by RF magnetron sputtering
23
Citations
8
References
2009
Year
Materials EngineeringMagnetismMaterials ScienceBoron NitrideEngineeringPhysicsHexagonal Boron NitrideApplied PhysicsRf MagnetronNitrogen Gas RatioMicroelectronicsThin Film ProcessingBcn Films
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