An experimental approach for dynamic investigation of the trapping properties of glass-ceramic under electron beam irradiation from a scanning electron microscope

Abstract

A method is described that allows the trapping charge kinetics in insulating materials during their electron irradiation in a scanning electron microscope (SEM) to be studied and the total trapped charge to be evaluated. The method consists in analyzing the leakage and the displacement currents measured simultaneously, during and after irradiation, using an arrangement adapted to the SEM. The dynamic trapping properties of glass-ceramic are investigated and the time constants for charging and discharging processes are evaluated. By correlating the leakage and displacement currents, the total electron yield σ during irradiation is also determined.