Plasma deposition of boron films with high growth rate and efficiency using carborane

O.I. Buzhinskij, D.G. Whyte, M.J. Baldwin, R.W. Conn, R.P. Doerner, R. Seraydarian, S. Luckhardt, H. Kugel, W. P. West

Journal of Nuclear Materials · 2003 · 33 citations · 4 references

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