Concepedia

Publication | Closed Access

Superior thermal stability of Ta/TaN bi-layer structure for copper metallization

DOI

91

Citations

25

References

2006

Year

Qi Xie, Xin-Ping Qu, Jingjing Tan, Yu-Long Jiang, Mi Zhou, Tao Chen, Guo-Ping Ru
Applied Surface Science

References

YearCitations

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