ITO thin films deposited at low temperatures using a kinetic energy controlled sputter-deposition technique - Concepedia

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ITO thin films deposited at low temperatures using a kinetic energy controlled sputter-deposition technique

56

Citations

8

References

2002

Year

Y. Hoshi, T. Kiyomura

Thin Solid Films

Materials ScienceLow TemperaturesEngineeringMicrofabricationSurface ScienceApplied PhysicsKinetic EnergyIto Thin FilmsThin FilmsPulsed Laser DepositionMicroelectronicsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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