Concepedia

Publication | Closed Access

Water and oxygen permeation of silicon nitride films prepared by plasma-enhanced chemical vapor deposition

DOI

61

Citations

13

References

2004

Year

Dong‐Sing Wuu, W.C. Lo, C. C. Chiang, H.B. Lin, L.-S. Chang, Ray‐Hua Horng, C.-L. Huang, Ying Gao
Surface and Coatings Technology

References

YearCitations

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