Design and control for an electromagnetically driven X–Y–θ stage - Concepedia

Concepedia

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Design and control for an electromagnetically driven X–Y–θ stage

77

Citations

11

References

2002

Year

Kuo‐Shen Chen, David L. Trumper, Stuart T. Smith

Precision Engineering

Electrical EngineeringEngineeringX–y–θ StageMicrowave EngineeringElectromagnetic Compatibility

References

	Year	Citations

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