Surface reaction and stability of parylene N and F thin films at elevated temperatures - Concepedia

Concepedia

Publication | Closed Access

Surface reaction and stability of parylene N and F thin films at elevated temperatures

34

Citations

12

References

1995

Year

Peter Wu, G.‐R. Yang, J. F. McDonald, Toh‐Ming Lu

Journal of Electronic Materials

Materials ScienceSurface CharacterizationEngineeringF Thin FilmsParylene NSurface ScienceApplied PhysicsSurface EngineeringThin FilmsSurface ReactionThin Film Processing

References

	Year	Citations

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