Concepedia

Publication | Closed Access

Energy calibration of the 500 kV heavy ion implanter ionas

DOI

346

Citations

10

References

1985

Year

M. Uhrmacher, K. Pampus, F.J. Bergmeister, D. Purschke, Klaus Lieb
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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