Light-ion sputtering yields for molybdenum and gold at low energies

Abstract

The sputtering yields of molybdenum and gold for H+, D+, 3He+, and 4He+ ion irradiation at normal incidence with large irradiation doses have been measured for energies between 150 eV and 20 keV. The yields were determined from the weight loss of the targets. The sputtering yields are strongly influenced by threshold effects for energies below ∼10 keV. It is found that the experimental yields can be described by a yield formula with an energy parameter E′=E/Eth, where Eth is a theoretical threshold energy.