Comparative characterization of alumina coatings deposited by RF, DC and pulsed reactive magnetron sputtering

R. Cremer, Mirjam Witthaut, D. Neuschütz, G. Erkens, T. Leyendecker, M. Feldhege

Surface and Coatings Technology · 1999 · 85 citations · 12 references

Concepts

References

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