Surface and Coatings Technology · 1999 · 85 citations · 12 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationSurface ScienceThin FilmsAluminum OxidesCoating ProcessesCoating TechnologyCoatingsSurface CoatingsThin-film DepositionAluminaAlumina CharacterizationAlumina Thin FilmsCeramic CoatingsCoating CharacterizationMagnetron SputteringReactive Sputtering
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Crystalline alumina deposited at low temperatures by ionized magnetron sputtering
Jochen M. Schneider, William D. Sproul, Andrey A. Voevodin et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 128 citations
Natural Sciences, Materials Engineering, Materials Science +17
Thermal stability of Al–O–N PVD diffusion barriers
R. Cremer, Mirjam Witthaut, Klaus Reichert et al. · Surface and Coatings Technology · 1998 · 78 citations
Natural Sciences, Materials Engineering, Materials Science +11