Publication | Closed Access
Ways towards the scaleable integration of carbon nanotubes into silicon based technology
72
Citations
29
References
2004
Year
Materials ScienceNanoscale SystemEngineeringWafer Scale ProcessingCarbon-based MaterialMicrofabricationNanotechnologyNanomaterialsApplied PhysicsScaleable IntegrationNanocomputingNanotubesCarbon NanotubesNano Scale
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