Photonic crystal slot-microcavity circuit implemented in silicon-on-insulator: High Q operation in solvent without undercutting

Abstract

We report the fabrication and characterization of a silicon-based photonic integrated circuit consisting of a photonic crystal slot-cavity, waveguides, and grating couplers, designed as a robust, easy-to-use device for enhancing light-matter interactions at a precise location inside a fluidic medium, while minimizing fabrication complexity. Measured Q values in excess of 7500 for circuits immersed in hexane and operating near 1.5 μm are obtained, in good agreement with simulations. The detection limit for changes in solvent refractive index unit (RIU) for these structures, which have not been optimized, is 2.3×10−5 RIU.