Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2011 · 11 citations · 14 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsThin FilmsIon ImplantationSemiconductor Crystal GrowthSemiconductor Device MaterialsThin-film DepositionThin-film MaterialsWide-bandgap SemiconductorsDopant ImplantationImplantation Through Thin FilmsImplantation-induced Defect FormationIon Implantation EffectsIon PlatingMillingPost-implantation Annealing
14