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Remote plasma sputtering of indium tin oxide thin films for large area flexible electronics

Materials EngineeringMaterials ScienceIndium TinPlasma ElectronicsEngineeringFlexible ElectronicsNanoelectronicsSurface ScienceApplied PhysicsThin FilmsRemote Plasma SputteringMicroelectronicsGas Discharge PlasmaPlasma ProcessingThin Film Processing