Publication | Closed Access
Lifetime improvement of micro-fabricated alkali vapor cells by atomic layer deposited wall coatings
37
Citations
26
References
2013
Year
Materials ScienceThermal Spray CoatingEngineeringMicrofabricationThermal Barrier CoatingSurface ScienceApplied PhysicsWall CoatingsLifetime ImprovementChemical DepositionMicroelectronicsAtomic LayerChemical Vapor Deposition
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