Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 13 citations · 3 references
EngineeringElectrical EngineeringDrillingMicrofabricationPhotonicsDrilling OperationsLaser PhysicsPolarization OpticsBirefringenceBirefringence AnalysisLaser DrillingLaser MicromachiningPolarizationPolarization PropertiesQ-switched Lasers
Laser microhole drilling using radially and tangentially polarized Q-switched laser radiation has been analyzed comparatively. Tangential polarization exhibited a significantly higher drilling speed compared to radial polarization. Light attenuation through interaction with the walls of a microhole was found to be weaker in the case of tangential polarization than in the case of radial polarization, thus leading to the assumption that the observed higher drilling rates utilizing tangential polarization are due to more energy being deposited at the bottom of a microhole. The required radiation has been generated using a Q-switched Nd:YAG laser resonator in a configuration that exploits thermally induced birefringence to render the laser resonator stable only for radial polarization.
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Polarization-selective grating mirrors used in the generation of radial polarization
Tobias Moser, H. Glur, Valerio Romano et al. · Applied Physics B · 2005 · 79 citations · Full text