Electron inelastic scattering and secondary electron emission calculated without the single pole approximation

Abstract

In this work, aimed primarily at providing more accurate electron inelastic mean free paths (IMFPs) and stopping powers (SPs) at low energies than are provided by the single pole approximation, the “full Penn” algorithm has been employed to derive the electron inelastic scattering energy loss function in solids. IMFPs and SPs have thus been calculated in the energy range from 1 eV to 10 keV and are in good agreement with the experimental data. This treatment of electron inelastic scattering combined with a consistent model for the cascade secondary electron generation has enabled more elaborate Monte Carlo simulations of secondary electron emission from metals. The calculated results of the energy distributions and the secondary electron emission yields for Al and Cu agree reasonably with experimental results.