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Comparison between nanoindentation and scratch test hardness (scratch hardness) values of copper thin films on oxidised silicon substrates

Materials ScienceMaterials EngineeringSurface CharacterizationEngineeringMicrofabricationSurface ScienceApplied PhysicsThin FilmsElectronic PackagingMicroelectronicsTest HardnessSurface ProcessingOxidised Silicon SubstratesCopper Thin FilmsThin Film Processing