Publication | Closed Access
TiN films prepared by unbalanced planar magnetron sputtering under control of photoemission of Ti
18
Citations
8
References
1996
Year
Materials ScienceMaterials EngineeringTin FilmsEngineeringNanoelectronicsSurface ScienceApplied PhysicsUnbalanced Planar MagnetronThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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