Reflective properties of Mo/Si multilayer for EUV lithography deposited by the magnetron sputtering device with superconducting bulk magnets

Takashi Yamaguchi, Hiroshi Ikuta, Tetsuya Tomofuji, Y. Yanagi, Yoshitaka Itoh, Tetsuo Oka, Uichiro Mizutani

Physica C Superconductivity · 2008 · 11 citations · 13 references

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