Thin Solid Films · 1988 · 44 citations · 7 references
Natural SciencesChemistryMaterials ScienceSurface EngineeringSurface ScienceThin FilmsChemical Vapor DepositionCoatingsPlasma Surface TreatmentSurface PhysicsThin-film DepositionThin-film MaterialsChemical Vapor Deposition MaterialsMetal-organic Chemical Vapor DepositionPlasma-assisted Chemical Vapor DepositionPlasma-enhanced Chemical Vapor DepositionPlasma-enhanced Deposition
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π-Allyl Derivatives of Transition Metals
W. R. McClellan, Harvey H. Hoehn, H. N. Cripps et al. · Journal of the American Chemical Society · 1961 · 210 citations
Plasma Deposition of Inorganic Thin Films
A. R. Reinberg · Annual Review of Materials Science · 1979 · 57 citations