Publication | Closed Access
A mass spectrometric analysis of CF4/O2 plasmas: Effect of oxygen concentration and plasma power
21
Citations
13
References
1990
Year
Cold Atmospheric PlasmaOxygen ConcentrationBiochemistryNatural SciencesSpectroscopyMass SpectrometryAnalytical ChemistryCf4/o2 PlasmasChemistryNonthermal PlasmaPlasma PowerSpectrochemical Analysis
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