Publication | Closed Access
Evaluation of double sided lapping using a fixed abrasive pad for sapphire substrates
71
Citations
9
References
2012
Year
Materials ScienceMaterials EngineeringEngineeringSapphire SubstratesMicrofabricationSurface ScienceFixed Abrasive PadMicroelectronicsSurface ProcessingAbrasive MachiningAbrasive ProcessDouble Sided Lapping
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