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Sub-10nm patterning by focused He-ion beam milling for fabrication of downscaled graphene nano devices

Materials ScienceGraphene NanomeshesGraphene Quantum DotEngineeringNanoengineeringMicrofabricationNanotechnologyNanomaterialsNanoelectronicsApplied PhysicsGraphene FiberSub-10nm PatterningGrapheneGraphene NanoribbonNanofabrication