Enhanced reflection from inverse tapered nanocone arrays

Abstract

We computationally and experimentally demonstrate enhanced reflection effects displayed by silicon-based inverted nanocone arrays. A 3D finite element model is used to characterize the optical properties of the nanocone arrays with respect to the change in polarization and incident angles. The nanocone arrays are fabricated by e-beam lithography in hexagonal and triangular geometries with a lattice constant of 300 nm. The fabricated devices show a two-fold increase in reflection compared with bare silicon surface, as well as a strong diffraction within the visible and near-infrared spectra. The nanocone arrays may find a variety of applications from optical devices to energy conservation technologies.