Tuning of ripple patterns and wetting dynamics of Si (100) surface using ion beam irradiation - Concepedia

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Tuning of ripple patterns and wetting dynamics of Si (100) surface using ion beam irradiation

35

Citations

34

References

2013

Year

Tanuj Kumar, Udai B. Singh, Manish Kumar, Sunil Ojha, D. Kanjilal

Current Applied Physics

Ion ImplantationEngineeringPhysicsMicrofabricationSurface ScienceApplied PhysicsIon Beam IrradiationSemiconductor Device FabricationIon BeamSilicon On InsulatorMicroelectronicsRipple Patterns

References

	Year	Citations

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