Electron microscopy characterization of TiN films on Si, grown by d.c. reactive magnetron sputtering - Concepedia

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Electron microscopy characterization of TiN films on Si, grown by d.c. reactive magnetron sputtering

45

Citations

16

References

1995

Year

B. Pécz, N. Frangis, S. Logothetidis, I. Alexandrou, P.B. Barna, J. Stoëmenos

Thin Solid Films

Materials ScienceSurface CharacterizationTin FilmsEngineeringSurface ScienceApplied PhysicsElectron Microscopy CharacterizationThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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