Redistribution of Fe in thermally annealed semi-insulating InP(Fe): Determination of Fe diffusion coefficient in InP

Abstract

Iron redistribution in InP(Fe) annealed without encapsulant has been studied by using secondary ion mass spectrometry. In annealed crystals, thin surface Fe accumulation followed by Fe depletion appeared. It was clearly shown that the Fe redistribution results from a thermally stimulated Fe outdiffusion with a diffusion coefficient D=D0 exp(−E/kT); D0=2.5×10−4 cm2 s−1, E=1.7 eV at the temperature range from 700 to 900 °C.