Analysis of Striations in a Coplanar Discharge

Guangsup Cho, Eun Ha Choi, Jin-Goo Kim Jin-Goo Kim, Young-Guon Kim Young-Guon Kim, Jae-Jun Ko Jae-Jun Ko, Dai-Il Kim Dai-Il Kim, Choon‐Woo Lee, Yoonho Seo, Han S. Uhm

Japanese Journal of Applied Physics · 1999 · 11 citations · 4 references

Concepts

Abstract

Striations are observed only in coplanar or wedge-shaped planar AC-type discharges. On the basis of the observation results, striations are analyzed and discovered to be related to the ion waves generated by the self-sustained perturbations during the force-balancing process between ion and electron wall charge clouds accumulated on the dielectric layer over the metal electrodes.

References

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