Publication | Closed Access

Design and analysis of piezoresistive microcantilever for surface stress measurement in biochemical sensor

Piezoresistive MicrocantileverEngineeringFlexible ElectronicsMicrofabricationBiochemical SensorBioelectronicsMechanical EngineeringBiochemical SensorsAnalytical MicrosystemsSensor DesignBiomedical EngineeringSurface Stress MeasurementMicrofluidicsSensor Technology