The response of a capacitively coupled discharge to the formation of dust particles: Experiments and modeling

Abstract

The influence of dust particles on the properties of a capacitively coupled Ar–C2H2 discharge is studied both experimentally and theoretically. The results of measurements of the intensity and spatial distribution of the emitted light, the line width of the fast component of Hα line and of the electron density during the particle growth are presented. To analyze the experimental results a one-dimensional discharge model is developed. Using the model the effects of dust grains on the power absorption (taking into account stochastic and Ohmic heating in the plasma sheaths), the optical emission intensity profile, the sheath size, the rf electric field and on the energy of positive ions bombarding the electrodes are investigated. In particular, it is shown that the decrease of the power absorption in the sheaths of complex plasmas is due to the dependence of the stochastic and Ohmic heating in the plasma sheaths on the electron temperature and the current flowing across the discharge plates. The results of the calculations are compared with the available experimental data and found to be in good agreement.