Comparison of the properties of BN films synthesized by inductively coupled r.f. and microwave plasmas

A simple model for the formation of compressive stress in thin films by ion bombardment

C. A. Davis · Thin Solid Films · 1993 · 808 citations

Natural Sciences, Materials Science, Physics +15

Cubic boron nitride: synthesis, physicochemical properties and applications

Laurence Vel, G. Demazeau, J. Étourneau · Materials Science and Engineering B · 1991 · 454 citations

Natural Sciences, Chemistry, Materials Science +8

Properties of tetrahedral amorphous carbon prepared by vacuum arc deposition

David R. McKenzie, David A. Muller, Bernard Pailthorpe et al. · Diamond and Related Materials · 1991 · 245 citations

Natural Sciences, Materials Engineering, Materials Science +7

Effects of the substrate bias on the formation of cubic boron nitride by inductively coupled plasma enhanced chemical vapor deposition

Takanori Ichiki, T. Momose, Toyonobu Yoshida · Journal of Applied Physics · 1994 · 91 citations

Engineering, Materials Engineering, Materials Science +16

Preparation of cubic boron nitride films by low pressure inductively coupled plasma enhanced chemical vapor deposition

Takanori Ichiki, Toyonobu Yoshida · Applied Physics Letters · 1994 · 65 citations

Natural Sciences, Materials Engineering, Materials Science +15