Applied Surface Science · 2013 · 41 citations · 18 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSurface EngineeringSurface ScienceLaser Material ProcessingLaser PhysicsLaser Surface ProcessingOptoelectronic MaterialsSurface PhysicsThin Film Optical PropertiesAluminum NitrideInfrared Laser SpectroscopyLaser Surface AblationLaser Surface NanostructuringLaser Surface PatterningNitrides Thin Films
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