Surface and Coatings Technology · 1991 · 22 citations · 9 references
Natural SciencesMaterials EngineeringMaterials SciencePhysical ChemistryPlasma PhysicsSolid-state ChemistryAmorphous MaterialsAmorphous SolidsChemical Vapor DepositionHigh-temperature PlasmasPhysical Vapor DepositionAmorphous CarbonCarbon MaterialsPhysical PropertiesPlasma-enhanced Chemical Vapor Deposition
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