Journal of The Electrochemical Society · 1970 · 40 citations · 0 references
EngineeringMaterials EngineeringMaterials ScienceElectrochemistrySemiconductor DevicesSemiconductor MaterialsEpitaxial GrowthSemiconductor Crystal GrowthSemiconductor Device MaterialsSemiconductor Thin FilmsSilicon MaterialsThin-film DepositionEpitaxial Film GrowthEpitaxial MaterialsEpitaxial Thin-film GrowthSiliconSilicon Crystal GrowthSilicon EpitaxySilicon Thin Films