Publication | Closed Access
Competitive anion/anion interactions on copper surfaces relevant for Damascene electroplating
71
Citations
43
References
2012
Year
Materials ScienceMaterials EngineeringChemical EngineeringEngineeringSurface ElectrochemistrySurface ScienceFundamental ElectrochemistryCompetitive Anion/anion InteractionsChemistryElectrochemical InterfaceElectrochemistryAnodizingElectrochemical Surface Science
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