FACE-CENTERED-CUBIC TUNGSTEN FILMS OBTAINED BY

Abstract

Thick, stable tungsten films with fcc structure have been obtained by ion beam sputtering in vacuum onto substrates of glass, rock salt, and mica at a temperature of ∼250–400°C. The lattice constant is 4.15 Å. The fcc phase transforms slowly to bcc at annealing temperatures of ∼700°C.