Piezoresistance in Si<sub>3</sub>N<sub>4</sub> nanobelts: toward highly sensitive and reliable pressure sensors

Jinghui Bi, Guodong Wei, Minghui Shang, Fengmei Gao, Bin Tang, Weiyou Yang

Journal of Materials Chemistry C · 2014 · 12 citations · 34 references

Concepts

Abstract

We report the piezoresistance behavior of Si<sub>3</sub>N<sub>4</sub> nanobelts, which is expected to open the door for more studies of highly sensitive and reliable pressure sensors.

References

34