Publication | Closed Access
Influence of stress on the photoluminescence of porous silicon structures
68
Citations
6
References
1992
Year
Materials ScienceElectrical EngineeringPhotoluminescenceEngineeringOptical PropertiesSurface ScienceApplied PhysicsLuminescence PropertyHigh Porosity FilmsSemiconductor Device FabricationPorous SiliconPorous Silicon StructuresSilicon On InsulatorMicroelectronicsPlasma EtchingOptoelectronicsCompound Semiconductor
The blueshifting of photoluminescence spectra of porous silicon structures formed in p-type silicon is shown to be related to stresses in the porous material. A characteristic cellular structure, with varying length scale, is observed in the high porosity films due to high surface stresses. The cellular structure is not formed during the secondary open-circuit etching procedure itself but occurs during evaporation of the electrolyte after removal of the porous silicon from the etching solution.
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