Concepedia

Abatement of perfluorocarbons with combined plasma catalysis in atmospheric-pressure environment

Moo Been Chang, How Ming Lee

Catalysis Today · 2003 · 81 citations · 13 references

DOI

Concepts

References

13

Removal of NF/sub 3/ from semiconductor-process flue gases by tandem packed-bed plasma and adsorbent hybrid systems

Jen-Shih Chang, Konstantin Georgiev Kostov, K. Urashima et al. · IEEE Transactions on Industry Applications · 2000 · 87 citations

, , +13

Surface Wave Plasma Abatement of CHF<sub>3</sub> and CF<sub>4</sub> Containing Semiconductor Process Emissions

Bill A. Wofford, Marc W. Jackson, Chris L. Hartz et al. · Environmental Science & Technology · 1999 · 77 citations

, , +17

An Investigation of CFC12 (CCl2F2) Decomposition on TiO2 Catalyst

Subir Karmakar, Howard L. Greene · Journal of Catalysis · 1995 · 73 citations

, , +11

Catalytic Destruction of Halogenated Volatile Organic Compounds

H. Windawi, Mark F. Wyatt · Platinum Metals Review · 1993 · 64 citations

, , +15

Oxidative Conversion of PFC via Plasma Processing with Dielectric Barrier Discharges

Shen Jen Yu, Moo Been Chang · Plasma Chemistry and Plasma Processing · 2001 · 53 citations

, , +10