Concepedia
Statistics
Publications
2
Citations
151
H-Index
Active since
1998
Chris L. Hartz is an author specializing in engineering, chemical engineering, and electrical engineering.
Top concepts
EngineeringChemical EngineeringElectrical EngineeringPhysicsChemistryPlasma PhysicsApplied PhysicsMass SpectrometryPlasma SimulationPlasma Confinement
Publications per year
1998–1999
Innovative Surface Wave Plasma Reactor Technique for PFC Abatement
Chris L. Hartz, J. W. Bevan, Marc W. Jackson et al. · Environmental Science & Technology · 1998 · 77 citations
Chemical Engineering, Electrical Engineering, Engineering +10
Surface Wave Plasma Abatement of CHF<sub>3</sub> and CF<sub>4</sub> Containing Semiconductor Process Emissions
Bill A. Wofford, Marc W. Jackson, Chris L. Hartz et al. · Environmental Science & Technology · 1999 · 74 citations
Electrical Engineering, Chemical Engineering, Engineering +14
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