Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering - Concepedia

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Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering

DOI Full Paper Access

77

Citations

10

References

2000

Year

Nelly Alba de Sánchez, Christopher Rincon, G. Zambrano, H. Galindo, P. Prieto

Thin Solid Films

Materials ScienceDiamond-like CarbonEngineeringCarbon-based MaterialApplied PhysicsThin FilmsCarbon-based FilmsThin Film Processing

References

	Year	Citations

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